Stochastics control for production
You can’t control what you can’t measure
FAME 300 delivers Fractilia's highly accurate, precise measurements of stochastics to high-volume manufacturing (HVM). Built on a Linux Kubernetes cluster, FAME 300 provides the throughput, uptime and latency required for in-line process control and SEM tool and process monitoring across the fab.
FAME 300 is fully scalable and can measure every SEM image across an entire fab — including CD-SEMs and large-field SEMs from any vendor or generation. It integrates directly with the customer's Host/MES system and automatically feeds accurate results to SPC systems, machine-learning models and other automated systems.
Using Fractilia's patented FILM™ technology, customers receive more than 200 high-accuracy SEM measurements, including unbiased linewidth roughness (LWR), unbiased line edge roughness (LER), unbiased local critical dimension uniformity (LCDU), critical dimension (CD) and defectivity. FAME 300 can also deliver up to 20x improvement in SEM tool matching and up to 30% higher SEM throughput.
Customers can also combine FAME 300 with the optional Fractilia Overlay Package for the highest accuracy and precision SEM overlay measurements in HVM.
FAME 300 is part of the Fractilia Automated Measurement Environment and is a configuration of the FAME 3XX family of products. The system is configured for the needs of each individual customer.
FAME 3XX MEASURES every SEM IMAGE IN AN ENTIRE HVM FAB
FAME 3XX outputs results with the highest accuracy and precision available
Results support a wide range of HVM use cases
Benefits
Improve Scanner Overall Equipment Effectiveness (OEE)
Use Fractilia’s patented probabilistic process windows to accurately center your processes for optimum performance which can improve scanner OEE.
Reduce Opex/Capex
Mix and match metrology tool vendors and tool models while increasing SEM throughput 30% or more. FAME 300 provides accuracy and precision for any SEM tool from any vendor or generation.
Improve Process Control
Use FAME 300 as a Stochastics Line Monitor(TM) for in-line process control using 250+ accurate measurements of CD, roughness and stochastics that were not previously possible. Fractilia’s measurements have numerous uses including identifying process excursions and as inputs into AI/ML control systems.
SEM tool fleet matching
FAME 300 can improve SEM tool matching by up to 20x. Since FAME 300 provides accurate measurements regardless of SEM tool, model or vendor, you can use FAME 300 as the “Ruler” to compare results and track the health of your SEM fleet either in a single fab or between different fabs. FAME 300 provides automated SEM tool health monitoring on more than 10 critical tool metrics.
Migrate R&D measurements to high-volume manufacturing (HVM)
FAME 300 allows customers to transfer all Fractilia measurements from R&D directly to ramp and HVM using the same measurement engine.
Contact us for more information or to discuss an on-site evaluation of FAME 300.