Our Company


The goal of Fractilia is to bring rigor, accuracy, and ease-of-use to the measurement of pattern roughness, defectivity and other critical metrics for semiconductor manufacturing. We are a computational metrology company -- we combine our expertise in stochastics, lithography, and software to develop proprietary, physics-based algorithms which we implement in the most accurate and useful products available. Fractilia is based in Austin, Texas.



Chris A. Mack, CTO


Chris A. Mack is recognized worldwide as a leading expert in lithography and pattern roughness. He received Bachelor of Science degrees in physics, chemistry, electrical engineering, and chemical engineering from Rose-Hulman Institute of Technology in 1982, a Master of Science degree in electrical engineering from the University of Maryland in 1989, and a Ph.D. in chemical engineering from the University of Texas at Austin in 1998. He joined the Microelectronics Research Laboratory of the National Security Agency in 1983 and began work in optical lithography research. During 1990-91 Mr. Mack was on assignment at SEMATECH working in the areas of deep-UV photoresist characterization and phase-shifting mask optimization.

After founding FINLE Technologies in 1990 he joined FINLE full time in 1992 as President and Chief Technical Officer where he led the PROLITH and ProDATA software products to become the de facto industry standards for lithography simulation and data analysis. In February of 2000, FINLE Technologies was acquired by KLA-Tencor and for the next five years he served as Vice President of Lithography Technology for KLA-Tencor.  Since 2005 he has been a consultant, teacher, and writer in the field of lithography.  In 2017 he co-founded Fractilia, LLC, where he now works as CTO.

In the past thirty years Dr. Mack has trained more than 4,000 lithographers from over 300 different companies around the world, and is an adjunct faculty member in the Chemical Engineering Department of the University of Texas at Austin.




Edward Charrier, CEO and President


Ed Charrier has worked in software technologies and data analysis for more than 30 years. As the COO of FINLE Technologies he partnered with Chris Mack to grow the company from a startup through its acquisition and integration by KLA-Tencor. During his 14 years at KLA, he held several senior positions including Vice President and General Manager of the Process Control Information Division where he had P/L responsibility for eight enterprise and standalone software products with operations in nine countries. He received a Bachelor of Science in Engineering degree from the University of Michigan and a Master of Business Administration degree from The University of Texas at Austin.