NEWS

Updates

February 16, 2024: Fractilia releases version 4.2 of our family of products including MetroLER, FAMEview, FAME 100xE, FAME 200 and FAME 300. This release includes numerous new measurement and analysis capabilities. Please contact Fractilia for more information.

October 16, 2023: Fractilia releases version 4.1 of our family of products including MetroLER, FAMEview, FAME 100xE, FAME 200 and FAME 300. This release includes numerous new measurement and analysis capabilities. Please contact Fractilia for more information.

June 9, 2023: Fractilia releases version 4.0 of our family of products including MetroLER, FAMEview, FAME 100, FAME 200 and FAME 300. This release includes the 4th Generation of our Fractilia Inverse Linescan Model (FILM) which provides the highest accuracy and precision of measurements of SEM images. This release also includes numerous other new measurement and analysis capabilities. Please contact Fractilia for more information.

March 24, 2023: Fractilia releases version 3.2.0 of our family of products including MetroLER, FAMEview and the FAME automated analysis products. This release is our first with the Fractilia Overlay Package that measures and analyzes SEM-based overlay. In addition, this release includes numerous other new measurement and analysis capabilities that increase the accuracy of our solutions. Please contact Fractilia for more information.

December 16, 2022: Fractilia releases version 3.1.5 of our family of products including MetroLER, FAME 100 and FAMEview. This release includes numerous new measurement and analysis capabilities that increase the accuracy and speed of our solutions as well as several new use cases. Please contact Fractilia for more information.

September 16, 2022: Fractilia releases version 3.1.0 of our family of products including MetroLER, FAME 100 and FAMEview. This release includes numerous new measurement and analysis capabilities that increase the accuracy and speed of our solutions as well as several new use cases. Please contact Fractilia for more information.

June 18, 2022: Fractilia releases version 3.0.5 of our family of products including MetroLER, FAME 100 and FAMEview. This release includes numerous new measurement and analysis capabilities that increase the accuracy and use cases of Fractilia products. Please contact Fractilia for more information.

February 17, 2022: Fractilia releases version 3.0 of our family of products including MetroLER, FAME 100 and FAMEview. We are proud to announce that this version includes our proprietary 3rd generation FILM model that enables unprecedented accuracy and precision for the measurement of stochastics with numerous new capabilities such as unbiased LCDU measurements for contacts and pillars. Please contact Fractilia for more information.

December 10, 2021: Fractilia releases version 2.4.0 of our family of products including MetroLER, FAME 100 and FAMEview. This version adds new measurement and analysis capabilities for several new use cases and increases the speed of analysis by up to 2x. Please contact Fractilia for more information.

September 17, 2021: Fractilia releases version 2.3.5 of our family of products including MetroLER, FAME 100 and FAMEview. This version adds new measurement and analysis capabilities for several new use cases including our patent-pending Probabilistic Process Window. Please contact Fractilia for more information.

June 10, 2021: Fractilia releases version 2.3.0 of our family of products including MetroLER, FAME 100 and FAMEview. This version adds new measurement and analysis capabilities for several new use cases. Please contact Fractilia for more information.

February 12, 2021: Fractilia releases FAME, the Fractilia Automated Measurement Environment! With the release of FAME, customers have access to Fractilia’s accurate measurements in an automated fab-wide solution which enables numerous valuable new use cases. Please visit the FAME web page or contact Fractilia for more information.

February 12, 2021: Fractilia releases MetroLER version 2.2.7 adding new measurement and analysis capabilities for several new use cases including FAME compatibility. Please contact Fractilia for more information.

December 11, 2020: Fractilia releases MetroLER version 2.2.5 adding a very large number of new measurement and analysis capabilities for several new use cases. Please contact Fractilia for more information.

September 20, 2020: Fractilia releases MetroLER version 2.2.0 adding measurements for new feature types and numerous analysis capabilities. Please contact Fractilia for more information.

July 10, 2020: Fractilia releases MetroLER version 2.1.3 adding new proprietary analysis capability for contact hole and pillar defectivity as well as numerous other features. Please contact Fractilia for more information.

June 10, 2020: Fractilia now has 9 issued US patents. Our unique edge detection algorithms combined with our proprietary analysis methodologies produce measurements with the highest accuracy and precision for a wide range of important metrics.

May 21, 2020: Fractilia announces the opening of our Fractilia Academy web site. The Academy is part of Fractilia’s initiative to enhance remote support for our customers and the industry through the current pandemic and beyond. The site contains information on the science of stochastics and how best to measure its effects. The Customer Section includes software user training videos and other information for use by our customers. This site will be updated frequently, so please check back often.

May 10, 2020: Fractilia releases MetroLER version 2.1.2 adding new use cases and more than 80 enhancements. Please contact Fractilia for more information.

February 14, 2020: Fractilia releases MetroLER version 2.1.1 adding new use cases including tip-to-tip measurements as well as numerous other enhancements. Please contact Fractilia for more information.

December 30, 2019: Fractilia has ended 2019 with four issued US patents plus several pending patent applications. We are proud to combine our substantial intellectual property, domain knowledge, customer focus, and dedication to product quality to produce the most accurate and useful measurement products available.

December 13, 2019: Fractilia releases MetroLER version 2.1.0 adding several new use cases and feature types as well as numerous other enhancements. Please contact Fractilia for more information.

October 15, 2019: Fractilia releases the Network License Server version, providing additional options for wider deployment of MetroLER. Please contact Fractilia for more information.

September 25, 2019: Fractilia releases MetroLER version 2.0.5 with numerous new capabilities and significantly faster execution speed. Please contact Fractilia for more information.

March 15, 2019: Fractilia releases MetroLER version 2 with our patented second-generation Fractilia Inverse Linescan Model (FILM).

January 10, 2019: Fractilia releases MetroLER version 1.8.0 with new analysis capabilities along with significantly enhanced usability. Contact Fractilia for more information.

November 16, 2018: Fractilia releases MetroLER version 1.7.7 with even greater accuracy, faster execution speed and new feature analysis capabilities. Contact Fractilia for more information.


Papers & Press

 

Papers and events of interest at 2024 SPIE Advanced Lithography Conference: Download

Press Release: Fractilia is proud to announce our Fractilia Overlay Package which provides the most accurate and precise measurement of SEM-based overlay.

Press Release: Fractilia is proud to announce our FAME 300 product for high-volume manufacturing!

Here are Fractilia’s papers and events at SPIE 2023 the week of February 26, 2023! We look forward to seeing everyone in person!

Press Release: Fractilia dares chipmakers to take the Fractilia Challenge for up to 20x better scanning electron microscope matching and higher throughput at no obligation

Here are Fractilia’s papers and events at SPIE 2022 the week of April 24, 2022! We look forward to seeing everyone in person!

Fractilia announces the release of FAME version 3.0!

Finding, Predicting EUV Stochastic Defects, by Mark Lapedus in Semiconductor Engineering, June 17, 2021

Papers and events of interest at 2021 SPIE Advanced Lithography: Download

Papers and events of interest at 2019 SPIE Advanced Lithography: Download

EUV's New Problem Areas, by Mark Lapedus in Semiconductor Engineering

February 19, 2018: Contact hole measurement and analysis capability released in MetroLER version 1.5

See MetroLER results at the 2018 SPIE Advanced Lithography Conference: Download a schedule of technical papers with results from MetroLER -- Updated February 21, 2018

July 6, 2017: Fractilia releases MetroLER version 1.0

Fractilia: Pattern Roughness Metrology, by Mark Lapedus in Semiconductor Engineering

SPIE Newsroom video:  Chris Mack -- Stochastics and the phenomenon of line-edge roughness

SPIE Newsroom video on Fractilia